Ozone semiconductor gas sensor is made of gas sensitive semiconductor material made of solid metal oxides. Ozone semiconductor gas sensor is mainly used for ozone concentration detection. The ozone sensor has high sensitivity to ozone and strong oxidizing gases such as chlorine and nitrogen dioxide. It has the characteristics of low cost, simple manufacturing, high sensitivity, fast response, long life, long-term stability, simple test circuit and so on. Ozone sensor is widely used in household and atmospheric environment ozone concentration detection.